These multi-stage regulators are intended for pressure control of ultra high purity gases for applications requiring constant pressure control and delivery regardless of supply pressure variations. They feature a 316L stainless steel diaphragm with a metal-to metal diaphragm seal to give no possibility of gas contamination. Internal seals and seat are PTFE resin. Maximum inlet pressure is 3000 PSIG and gauges are 2" diameter. Helium leak integrity is 1 x 10-9 scc/sec. Outlet ports are 1/4" FPT.

Regulators for non-corrosive gases have brass barstock bodies and gauges with a 10micron sintered bronze filter in both stages. Regulators for corrosive gases have stainless steel barstock bodies, gauges and 10 micron sintered stainless steel filters for increased corrosion resistance.